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National Repository of Grey Literature

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Methodology of not destructive determination of phosphorus concentration profile in Si wafers Holovský, Jakub ; Remeš, Zdeněk A new method of determination of diffusion profiles in fast, not destructive and contactless (with help of infra-red reflexion) way was designed, theoretically analysed, realized either in computational and in experimental field and finally successfully tested. Detailed record

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